CY-MSP180G-DC Desktop single sputter head magnetron sputtering coater 

Intro

Small desktop single-target DC magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It has the characteristics of miniaturization and standardization.

•  The magnetron target head has 1 inch and 2 inches to choose from. Customers can choose the target according to the size of the substrate to be plated.

• The device is equipped with 150W DC power supply, which can be used for metal sputter coating. 

• The coating machine is equipped with gas inlet port for the introduction of protective gas. If the customer needs the mixed gas, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs. 

• The instrument is equipped with advanced turbomolecular pump set, the ultimate vacuum is up to 1.0E-5pa, and other types of molecular pumps are also available.

Application:

The device can be used to prepare single-layer ferroelectric thin films, conductive films, alloy films, and so on. Compared with similar equipment, the single-target magnetron sputtering coater is compact, highly integrated and small in size, and can be placed on a desktop. It is an ideal equipment for laboratory preparation of material films.

Technical parameter

Detail pictures