Desktop single target magnetron sputtering coater with reciprocating sample table

Intro

• high cost performance magnetron sputtering coating equipment independently developed by our company, which has the characteristics of miniaturization and standardization.

• The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated;

•  the power supply is 150W DC power supply, which can be used for metal sputtering coating. 

• The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. 

• The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.

Application scope:

DC magnetron sputtering can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.

Technical parameters:

Detail picture